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Office |
E-mail |
Instructor |
薛景中 |
中研院應科中心411B |
shyue at gate.sinica.edu.tw |
Textbook |
T.L Alford, L.C. Feldman and J.W. Mayer, Fundamentals of Nanoscale Film Analysis, 2007, Springer. DOI: 10.1007/978-0-387-29261-8 |
References |
G. Friedbacher and H. Bubert, Surface and Thin Film Analysis: A Compendium of Principles, Instrumentation, and Applications, Second, Completely Revised and Enlarged Edition, 2011, Wiley-VCH. DOI: 10.1002/9783527636921
J.I. Goldstein, D.E. Newbury, P. Echlin, D.C. Joy, C.E. Lyman, E. Lifshin, L. Sawyer and J.R. Michael, Scanning Electron Microscopy and X-ray Microanalysis, 4th ed., 2018, Springer. DOI: 10.1007/978-1-4939-6676-9
J.C. Vickerman and I.S. Gillmore, Surface Analysis – The Principal Techniques, 2nd ed., 2009, John Wiley & Sons. DOI: 10.1002/9780470721582
J.C. Rivière and S. Myhra, Handbook of Surface and Interface Analysis: Methods for Problem-Solving, 2nd ed., 2009, CRC Press. ISBN: 978-0-8493-7558-3
E. Meyer, H.J. Hug, R. Bennewitz, Scanning Probe Microscopy – The Lab on a Tip, 2004, Springer. DOI: 10.1007/978-3-662-09801-1
F. Ernst and M. Rühle, High-Resolution Imaging and Spectrometry of Materials, 2003, Springer. DOI: 10.1007/978-3-662-07766-5
J. O’Connor, B.A. Sexton, R.St.C. Smart, Surface Analysis Methods in Materials Science, 2003, Springer. DOI: 10.1007/978-3-662-05227-3
D.P. Woodruff, T.A. Delchar, Modern Techniques of Surface Science, 2nd ed., 1994, Cambridge. DOI: 10.1017/CBO9780511623172
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Website |
http://www.shyue.idv.tw/surface.html
http://sa.shyue.idv.tw/
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Week |
Date |
Lecture Topic |
Slide |
Recording |
1 |
2/18 |
Introduction: surface |
20190113 [PDF] [quicktime] |
00 01 02 03 04 05 06 07 extra1 extra2 |
2 |
2/25 |
Introdction: vacuum system |
3 |
3/4 |
Rutherford Backscattering Spectrometry (RBS); Nuclear Reaction Analysis (NRA, a.k.a. Particle-Induced Gamma-ray Emission, PIGE) |
20190113 [PDF] [quicktime] |
01 02 03 |
4 |
3/11 |
Focused Ion Beam (FIB) |
20190113 [PDF] [quicktime] |
01 02 03 04 05 |
5 |
3/18 |
Field Emission Microscopy (FEM)/Field Ion Microscopy (FIM); Atom Probe |
6 |
3/25 |
Secondary Ion Mass Spectroscopy (SIMS) |
20190415 [PDF] [quicktime] |
01 02 03 04 05 06 07 08 09 10 11 12 13 |
7 |
4/1 |
Ion-Solid Interactions
Homework #1 assigned |
8 |
4/8 |
Sputter Depth Profile |
9 |
4/15 |
Secondary Neutral Mass Spectroscopy (SNMS)
Take-Home Exam; Homework #1 due |
10 |
4/22 |
Photoelectron Spectroscopy (PES): Ultraviolet Photoelectron Spectroscopy (UPS) and XPS |
20190415 [PDF] [quicktime] |
01 02 03 04 05 06 07 08 09 10 11 |
11 |
4/29 |
PES: X-ray Photoelectron Spectroscopy (XPS, a.k.a. Electron Spectroscopy for Chemical Analysis, ESCA) |
12 |
5/6 |
Sputter Depth Profile; UPS and Inverted Photoelectron Spectroscopy (iPES) |
13 |
5/13 |
Scanning Probe Microscopy (SPM): Scanning Tunneling Microscopy/Spectroscopy (STM/STS) |
20190113 [PDF] [quicktime] |
01 02 03 04 05 06 07 08 |
14 |
5/20 |
SPM: Atomic Force Microscopy (AFM) and related techniques |
15 |
5/27 |
Scanning Electron Microscopy (SEM) |
20190113 [PDF] [quicktime] |
01 02 03 04 05 |
16 |
6/3 |
SEM: Electron Backscatter Pattern (EBSP) and other techniques
Homework #2 assigned |
17 |
6/10 |
Auger Electron Spectroscopy (AES), Scanning Auger Microscopy (SAM) |
20190113 [PDF] [quicktime] |
01 02 03 |
18 |
6/17 |
Particle-Induced X-ray Emission (PIXE); Electron Probe Microanalysis (EPMA)
Final Exam; Homework #2 due |
20190113 [PDF] [quicktime] |
01 02 03 04 |
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Excellent |
Satisfactory |
Needs work |
Surface analysis and surface science |
Sensitivity as a function of spatial resolution |
- Sensitivity of different techniques
- Strength of different techniques
- Physical limitation
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None of the above |
Adsorption of molecules on surfaces |
- Collision rate
- Thermal desorption techniques
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None of the above |
Vacuum system |
- Selection of vacuum components
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- Category of vacuum pumps
- Vacuum gauges
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None of the above |
Surface crystallography |
- Ten 2D point groups
- Seventeen 2D space groups
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- Five 2D lattices
- Wood’s notation and matrix notation
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None of the above |
Ion Scattering Spectroscopy |
Rutherford Backscattering Spectrometry (RBS) |
- Kinematic factor
- Central force scattering
- Depth profiling
- Quantitative analysis
- Structural effect on channeling
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- Instrumentation
- Scattering cross-section
- Energy loss in solid
- Channeling
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None of the above |
Low Energy Ion Scattering (LEIS) |
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- Elastic recoil detection analysis
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None of the above |
Nuclear Reaction Analysis (NRA) |
- Depth profiling via resonance
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None of the above |
Ion beam techniques |
Focused Ion Beam (FIB) |
- Field evaporation
- Parameter for LMIS
- Ion-neutralization spectroscopy (INS)
- Focus of ion beam
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- Liquid metal ion source (LMIS)
- Imaging, deposition, etching operation
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None of the above |
Field Emission Microscopy (FEM)
Field Ion Microscopy (FIM) |
- Field emission
- Field ionization
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- Application of Helium Ion Microscope (HIM)
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None of the above |
Atom Probe |
- Local Electrode Atom Probe (LEAP)
- Sample preparation
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None of the above |
Sputtering |
- Preferential sputtering
- Artifacts in sputter depth-profile
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- Parameters that affect sputtering yield
- Cluster-ion sputtering
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None of the above |
Secondary Ion Mass Spectroscopy (SIMS) and Secondary Neutral Mass Spectroscopy (SNMS) |
- Mass resolution
- Effect of different primary beam
- Quantification and matrix effect
- Scanning Ion Microscope (SIM)
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- Static and dynamic mode
- Instrumentation
- Gating
- Qualitative analysis
- Isotope operation
- Depth profile
- Post-ionization
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None of the above |
Photoemission Spectroscopy (PES) |
X-ray Photoelectron Spectroscopy (XPS) |
- Pass energy and operation of analyzer
- Spectral features in XPS
- Final-state effect
- Chemical shift
- Quantitative analysis
- Angle-resolved XPS
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- Photoelectric effect
- Instrumentation
- Definition of kinetic energy of photoelectron
- Sampling depth
- Position of Auger peak
- Qualitative analysis
- Depth profile
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None of the above |
Ultra-violet Photoelectron Spectroscopy (UPS) |
- Angle-resolved UPS
- Valance band spectrum
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- Angle-integrated UPS
- Work function determination
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None of the above |
Inverted Photoelectron Spectroscopy (iPES) |
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None of the above |
Scanning Probe Microscopy (SPM) |
Scanning Tunneling Microscopy (STM) |
- Constant-current mode
- Constant-height mode
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- Tunneling
- Instrumentation
- Imaging of electron density
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None of the above |
Scanning Tunneling Spectroscopy (STS) |
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None of the above |
Atomic Force Microscopy (AFM) |
- Static vs. dynamic
- Contact vs. non-contact
- Force curve
- Tapping operation
- Lift operation
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- Instrumentation
- Constant height vs constant force
- Change in phase and amplitude
- Force Modulation Microscopy (FMM)
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None of the above |
Various modes of AFM |
- Piezoresponse Force Microscopy (PFM)
- Scanning Capacitance Microscopy (SCM)
- Scanning Electrical Potential Microscopy (SEPM)
-
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- Electric Force Microscopy (EFM)
- Magnetic Force Microscopy (MFM)
- Scanning Near-Field Optical Microscopy (SNOM)
- Lithography
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None of the above |
Instrumentation and operation considerations |
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- Effect of probe
- Artifact of piezo scanner
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None of the above |
Scanning Electron Microscopy (SEM) |
General SEM |
- Magnification and raster size
- Instrumentation
- Resolution limitation
- Operation modes for objective lens
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- Signal generation
- Depth of focus
- Resolution vs, current
- Kinetic energy of electrons
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None of the above |
SE and BSE imaging |
- Yield of SE and BSE
- Low-vacuum and environmental SEM
- Effect of instrumental parameters on the image
- Signal processing
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- Classification of SE
- Contrast in SE and BSE imaging
- Operation of detectors
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None of the above |
Advanced operation |
- Electron backscatter diffraction
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- Channeling pattern
- EBIC
- CL
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None of the above |
Auger Electron Spectroscopy (AES)
Scanning Auger Microscopy (SAM) |
- Two-electron de-excitation
- Coster-Kronig transition
- Operation mode of energy analyzer
- Quantitative analysis
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- Nomenclature
- Differential analysis
- Chemical shift
- Instrumentation
- Charge consideration
- Qualitative analysis
- Schemes of depth-profile
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None of the above |
Electron Probe Microanalysis (EPMA) and Particle-Induced X-ray Emission (PIXE) |
General |
- Inner-shell ionization by electron or high-energy particle
- X-ray fluorescence yield
- Interaction volume (lateral and depth distribution)
- Effect of beam energy
- Quantitative analysis (ZAF correction)
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- Characteristic x-ray and bremsstrahlung
- Selection rule of x-ray generation
- Qualitative analysis
- Accuracy of standard-less quantification
- X-ray imaging
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None of the above |
X-ray wavelength dispersive spectroscopy |
- Selecting crystals for XWDS
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- Fully focused x-ray spectrometer
- Maximizing signal intensity
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None of the above |
X-ray energy dispersive spectroscopy |
- Principle of Si(Li) and SDD
- Processing time and dead time ratio
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- Principle of pulse processing
- Role of collimater
- Detection solid angle
- Energy resolution of XEDS
- Artifacts in XEDS
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None of the above |